The standard method-recording of X ray fluorescence spectra of a standard Ge 0.2 As 0.4 Se 0.4 alloy followed by evaluation of its component spectral fractions and by building of dependences x XRF = f(x) and y XRF = f(y) for the As x (Ge y Se 1 -y ) 1 -x system-was employed to determine the quantitative contents of arsenic, germanium, and selenium in the Ge t As s Se 1 -t -s glassy alloys with X ray fluorescence analysis. The accuracy of the composition's determination was ±0.0005 for both x and y. However, it was not possible to use the external standard method for determining the tellurium in As y Se 1 -y ) 1 -x Te x alloys because tellurium, arsenic, and selenium had significantly different X ray fluorescence characteristics and, hence, substitution of the arsenic or selenium for tellurium at a fixed y resulted in tellurium emission fraction changing.

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