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The possibility of the calibrated Au nanoparticles formation in conditions of surface plasmon resonance at irradiation of the Au film/glass structure by pulsed YAG:Nd 3+ -laser radiation is investigated. Sizes of the Au fragments and their surface distribution were studied by the atom force microscopy. The effect of Au nanofragmentation was observed only at the second harmonic irradiation (λ = 0.532 µm). The large difference in the average values of Au nanoparticles sizesδ and distributions between created in the resonance conditions, R = Rmin,δ ∼ 80 nm and in case out of resonance R = Rmin,δ ∼ 1350 nm was established. A high degree of the height sizes homogeneity of Au nanoparticles has been shown by the histogram obtained from the atom force microscopy data. There was verified the conclusion about determining contribution of the plasmon subsystem field in nanofragmentation process of the Au film in the SPR conditions at high laser levels.

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