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We discuss the results of the studies of Z-pinch sources for photolithographic applications developed by Lambda Physik. We also report the results of fundamental investigations pursued by Fraunhofer-

Various properties of optical coatings are sensitive to the concentration of hydrogen in the constituent layers. Especially water, OH-compounds or hydrocarbons adsorbed by the layers have a dominant influence on the absorption, and on the laser induced -damage behavior at 10.6 pm.In this paper, data of single layers of YbF3, BaF2, YF3 and NaF and multilayer coatings produced by conventional thermal evaporation (boat, e-beam) and ion assisted deposition (lAD) are compared.Hydrogen concentration depth profiling was performed using nuclear reaction analysis based on the reaction 1H(1N, cry)12C. Absorption was measured with the aid of a laser calorimeter and a cw CO2 laser. A computer -controlled test facility with a TEA CO2 laser was used for determining the 1-on-I damage thresholds of the coatings.The results point out that the absorption and damage behavior of coatings for the CO laser wavelength are related to the total amount of species containing hydrogen. Most of the lAD coatings exhibit a lower hydrogen contamination than conventional thin films.

The sections in this article are Introduction and Definitions Introduction Historical Aspects Definition of Quality: Product Functionality Quality Control Quality Assurance Management and Strategy PAT Initiative PAT Toolbox The Concept of Quality by Design ( Qb D ) ICH The Concept of a Design Space Implications for Other Branches of the Life Sciences General Remarks Biotechnology Food Industry Summary and Outlook Toolboxes for Process Control and Understanding Introduction: Causality Sampling Process Validation Role of Design of Experiments ( Do E ) Role of Failure Mode and Effects Analysis ( FMEA ) Measurement Technologies (How to Measure) Selection of the Appropriate Technique Working in Aqueous Systems Trace Analysis Qualification of a Spectrometer Data Analysis and Calibration (How to Process Data and How to Calibrate) Introduction Spectral Data Pretreatments and Data Cleaning Chemometrics Regression Analysis Process Control (How to Control a Process) Specific Problems Encountered in Industrial Process Analytics Moisture Measurements ( NIR , MW ) NIR Spectroscopy Microwave Resonance Technique ( MWR ) Process Analytics of Solids and Surfaces: Specular and Diffuse Reflectance Working in Multiple Scattering Systems: Separating Scatter from Absorbance Basics in the Measurement of Opaque Systems Separation of Scatter from Absorption Optical Penetration Depth Spectral Imaging and Multipoint Spectroscopy Survey Through Industrial Applications Selection of Applications Pharmaceutical Industry UV /Vis Spectroscopy NIR Spectroscopy Raman Spectroscopy Imaging Techniques Food and Agriculture UV /Vis Spectroscopy NIR Spectroscopy Raman Spectroscopy Imaging Techniques Polymers UV /Vis Spectroscopy NIR Spectroscopy Raman Spectroscopy Imaging Techniques Perspectives Technology Roadmap 2015+ Medical Applications and Tomographic Imaging Multi‐ Point‐Information Systems in Manufacturing Multimodal Spatially Resolved Spectroscopy Microreactor Control and Reaction Tomography