With the development of Micro-/Nanoelectromechanical systems (MEMS/NEMS), the friction problems at micro/nanoscale induced the failure of many devices in MEMS. The basic model of atomic-scale friction and associated advancement of experimental research were reviewed in this paper. Two common atomicfriction behaviors, i.e. stick-slip and super-lubricity friction were also discussed here. Challenges and promising points for future research in atomic-scale friction were enumerated.