The trend in near‐infrared (NIR) spectroscopy is to go toward on‐site, in‐field, on‐the‐go applications with calibration‐free instruments and off‐the‐shelf chemometrics software. Micro‐electro‐mechanical systems (MEMS) and micro‐opto‐electro‐mechanical systems (MOEMS) represent manufacturing techniques and components, capable of enabling highly miniaturized, robust, and low‐cost sensors and actuators. This article presents common MEMS and MOEMS manufacturing techniques and gives an insight into the demands of NIR spectroscopic applications. The main instrument categories are covered by a short theory followed by examples. Most thoroughly handled topics are Fourier transform spectrometers (FTSs), Fabry–Perot interferometers (FPIs), and dispersive spectrometers. Two other categories are also separately presented, namely light modulator systems and tunable MEMS light sources. We give an overview on NIR spectroscopy and its special requirements regarding the realization of MEMS spectrometers.

VTT has developed a fast, tunable Fabry-Perot (FP) filter component and applied it in making small, lightweight spectral cameras and light sources. One application field where this novel technology is now tested is medical field. A demonstrator has been made to test the applicability of FP based spectral filtering in the imaging of retina in visible light wavelength area.

The trend in near‐infrared (NIR) spectroscopy is to go toward on‐site, in‐field, on‐the‐go applications with calibration‐free instruments and off‐the‐shelf chemometrics software. Micro‐electro‐mechanical systems (MEMS) and micro‐opto‐electro‐mechanical systems (MOEMS) represent manufacturing techniques and components, capable of enabling highly miniaturized, robust, and low‐cost sensors and actuators. This article presents common MEMS and MOEMS manufacturing techniques and gives an insight into the demands of NIR spectroscopic applications. The main instrument categories are covered by a short theory followed by examples. Most thoroughly handled topics are Fourier‐transform spectrometers (FTSs), Fabry–Perot interferometers (FPIs), and dispersive spectrometers. Two other categories are also separately presented, namely light modulator systems and tunable MEMS light sources. We give an overview on NIR spectroscopy and its special requirements regarding the realization of MEMS spectrometers.

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