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An algorithm, which combines the use of Domain Decomposition and Model Order Reduction methods based on Proper Orthogonal Decomposition, is proposed. The algorithm allows for the efficient handling of electro-mechanical coupled problems in MEMS, with a strong reduction of computing time with respect to standard monolithic or staggered solution strategies. Examples of coupled electro-mechanical problems, concerning a vibrating beam subject to variable electrostatic forces, are presented and discussed.

SUMMARY A domain decomposition approach for the solution of the coupled electro‐mechanical problem in dynamics is proposed. The finite element analysis of a coupled electro‐mechanical system is frequently found, for example, in the modelling and design of microsystems and may lead to a burdensome nonlinear problem solution, particularly in the dynamic case. Two versions of the algorithm are proposed: the first one, called single‐level decomposition, exploits the natural partition of the analysis domain given by the two physics to be solved; the second one, called two‐level decomposition, adds a further subdivision of each physics into subdomains. The multilevel domain decomposition strategy here proposed is shown to accurately predict the response of microsystems subjected to electro‐mechanical coupling and to allow for a significant reduction in the computational burden. Copyright © 2012 John Wiley & Sons, Ltd.