A novel precursor for ZnO film deposition with Zn-O structure was synthesized by the reaction of diethylzinc and water in some ether solvents. The novel precursor was characterized by 1H-NMR spectroscopy and differential scanning calorimetry (DSC). Nondoped and In-doped ZnO films on a glass substrate have been successfully grown by conventional spin coating using nondoped and In added novel precursor solution. The samples have an optical transmittance of more than 85%, and a smooth surface determined from optical transmittance and scanning electron microscopy, respectively. The sheet resistivity of In-doped ZnO films is lower than that of nondoped ZnO film.

Nondoped ZnO films on a glass substrate have been successfully grown by conventional spin coating at room temperature using a diethylzincbased solution. The samples have an optical transmittance of more than 80%, and a smooth surface determined from optical transmittance and scanning electron microscopy, respectively. #

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