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Based on the image formation theory, the image contrast of cluster atoms taking account of inelastic scattering are simulated with the experimental result for carbon film made by sputter deposition. The contrast g for the cluster atoms has been calculated by integrating the scattering wave for coherent waves, and for incoherent waves the amplitude scattered outside the limiting angle αset by the aperture respectively,in which the first term (real part of the wave function we (υj,γj))is the phase contrast due to the total phase which is combined by ηj(O) and γj. The second term and the third term show the amplitude contrast by the elastic and inelastic scattering absorption respectively. The wave function of inelastic scattering Wine(υj,γj) is given by