Edge termination is the enabling building block of power devices to exploit the high breakdown field of wide bandgap (WBG) and ultra-wide bandgap (UWBG) semiconductors. This work presents a heterogeneous junction termination extension (JTE) based on p-type nickel oxide (NiO) for gallium oxide (Ga2O3) devices. Distinct from prior JTEs usually made by implantation or etch, this NiO JTE is deposited on the surface of Ga2O3 by magnetron sputtering. The JTE consists of multiple NiO layers with various lengths to allow for a graded decrease in effective charge density away from the device active region. Moreover, this surface JTE has broad design window and process latitude, and its efficiency is drift-layer agnostic. The physics of this NiO JTE is validated by experimental applications into NiO/Ga2O3 p–n diodes fabricated on two Ga2O3 wafers with different doping concentrations. The JTE enables a breakdown voltage over 3.2 kV and a consistent parallel-plate junction field of 4.2 MV/cm in both devices, rendering a power figure of merit of 2.5–2.7 GW/cm2. These results show the great promise of the deposited JTE as a flexible, near ideal edge termination for WBG and UWBG devices, particularly those lacking high-quality homojunctions.

This work demonstrates a lateral Ga2O3 Schottky barrier diode (SBD) with a breakdown voltage (BV) over 10 kV, the highest BV reported in Ga2O3 devices to date. The 10 kV SBD shows good thermal stability up to 200 o C, which is among the highest operational temperatures reported in multi-kilovolt Ga2O3 devices. The key device design for achieving such high BV is a reduced surface field (RESURF) structure based on the p-type nickel oxide (NiO), which balances the depletion charges in the n-Ga2O3 channel at high voltage. At BV, the charge-balanced Ga2O3 SBD shows an average lateral electric field (E-field) over 4.7 MV/cm at 25 o C and over 3.5 MV/cm at 200 o C, both of which exceed the critical E-field of GaN and SiC. The 10 kV SBD shows a specific on-resistance of 0.27 Ω·cm 2 and a turn-on voltage of 1 V; at 200 o C, the former doubles and the latter reduces to 0.7 V. These results suggest the good potential of Ga2O3 devices for mediumand high-voltage, high-temperature power applications. 1

Gallium nitride (GaN) devices are revolutionarily advancing the efficiency, frequency, and form factor of power electronics. However, the material composition, architecture and physics of many GaN devices are significantly different from silicon and silicon carbide devices. These distinctions result in many unique stability, reliability and robustness issues facing GaN power devices. This paper reviews the current understanding of these issues, particularly those related to dynamic switching, and their impacts on system performance. Instead of delving into reliability physics, this paper intends to provide power electronics engineers the necessary information for deploying GaN devices in existing and emerging applications, as well as provide references for the qualification evaluations of GaN power devices. The issues covered in this paper include the dynamic instability of device parameters (e.g., on-resistance, threshold voltage, output capacitance), the device robustness in avalanche, overvoltage and short-circuit conditions, the device's switching reliability and lifetime, as well as the device's ruggedness under radiation and extreme (cryogenic and elevated) temperatures. Knowledge gaps and immediate research opportunities in the relevant fields are also discussed. 1

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