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Abstract. The effect of dihedral angles in the junction region of tensoresistive layer to contact pads on strain distribution in mesa-piezoresistor body was studied using the finite element method. Influence of mesa-piezoresistor geometry on its sensitivity was demonstrated.

Abstract. The impact of singularity points on stress distribution in piezoresistive module is investigated by means of FEM simulation. The strong influence of singularities on stress distribution in silicon-glass interface is presented in this paper. Àííîòàöèÿ. Èñïîëüçóÿ òåõíèêó êîíå÷íî-ýëåìåíòíîãî ìîäåëèðîâàíèÿ, èññëåäîâàíî âëè-ÿíèå ñèíãóëÿðíûõ òî÷åê íà ðàñïðåäåëåíèå íàïðÿaeåíèé â ïüåçîðåçèñòèâíîì ìîäóëå. Ïî-êàçàíî ñèëüíîå âëèÿíèå ñèíãóëÿðíîñòåé íà ðàñïðåäåëåíèå íàïðÿaeåíèé íà èíòåðôåéñå êðåìíèé-ñòåêëî.Êëþ÷åâûå ñëîâà: êîíå÷íî-ýëåìåíòíîå ìîäåëèðîâàíèå, ñåíñîð äàâëåíèÿ, ñèíãóëÿðíàÿ òî÷êà