Piezoelectric activity in reactively sputtered lead zirconate titanate [Pb(Zr,Ti)O3 or PZT] thin films has been confirmed through the fabrication of surface acoustic wave delay lines on poled polycrystalline films of PZT deposited on glass substrates. Films of varying thickness ranging from 3.4 to 6 μm show a dispersion in resonant frequency for interdigital transducers designed to resonate at 44 MHz on bulk PZT material. The electromechanical coupling coefficient k2 was in the range 0.57–0.79% for hk=0.21–0.37.

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Porous Pb(Zr0.53 Ti0.47)O3 ceramics with three dimensionally interconnected structure were prepared by modifications of conventional powder sintering methods. The piezoelectric and elastic properties of the porous PZT were investigated by related with pore structures such as porosity and pore size. As porosity increased, permittivity decreased linearly and piezoelectric coefficient d 33 increased gradually, so the voltage output coefficient g 33 increased. The g 33 value was 200–300×10-3 (Vm/N) at the porosity of 0.65.

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