For the purpose of clarifying the process of the CVD of
normalTiN
, the chemisorption of
TiCl4
,
H2
, and
N2
on
normalTiN
has been investigated by the use of a thermal conductivity detector at 900 and 950 K. It has been found that the equilibrium constant of the chemisorption and the adsorption heat of
TiCl4
molecules are larger than those of hydrogen atoms and nitrogen atoms.
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