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It has been shown that phase-locked cavities have a quantised transfer function (Jennison 1979) and that they account for the property of inertia (Jennison and Drinkwater 1977). The analysis in this paper shows that only half of the rest energy of a phase-locked cavity contributes actively to the inertial force. The moment of inertia of such a system about its own axis is only half that of a classical rigid body of the same total rest mass distributed in the same region of space. If a phase-locked cavity is used as a model of a fundamental particle then it is concluded that the particle is a fermion with a rest mass corresponding to its total rest energy.

An electrostatic chuck (ESC) wafer stage with a built-in acoustic emission (AE) sensor is developed to detect micro-arc discharge occurring around a wafer. The built-in AE sensor detects acoustic waves caused by anomalous discharge with high sensitivity. The results demonstrate the effectiveness of this novel ESC wafer stage for detecting micro-arc discharge occurring around a wafer and will contribute greatly to improving the production yield of semiconductor manufacturing.Index Terms-Acoustic emission sensor, electrostatic chuck, Micro-arc discharge, plasma etching.

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We report an electrostatic chuck (ESC) wafer stage with a built-in acoustic emission (AE) sensor for detecting anomalies occurring around a wafer during plasma etching. The built-in AE sensor detects acoustic waves caused by wafer movement and micro-arc discharge with high sensitivity, and identifies these anomalies based on the frequency characteristics of the waves. The results demonstrate the effectiveness of using an ESC wafer stage with a built-in AE sensor for in-situ anomaly detection, which can improve the production yield and overall equipment efficiency in large scale integrated circuit (LSI) manufacturing.