To study nano-scale manufacturing using highly charged ion beams, a facility to produce and irradiate heavy ion beams has been installed at Kochi University of Technology ͑KUT͒. The facility includes an ECR ion source ͑ECRIS͒, a beam transport and analysis system, and an irradiation system. The first beam was extracted from ECRIS in January 2003. To evaluate the performance of ECRIS, the measurements of the current and mass spectrum of ion beams as a function of the voltage for the beam extraction and of the rf power have been carried out. It is concluded from the present results that the combined use of the ECRIS and acceleration system with the transport and analysis system build at KUT works normally.