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Abstract. We report the development of a chemical sensor based on a Co(II) phthalocyanine acrylate polymer (Co(II)Pc-AP) for perchlorate anion detection. We have used two types of transducers, silicon nitride (Si 3 N 4 ) and hafnium oxide (HfO 2 ). The adhesion of the Co(II)Pc-AP on different transducers and their surface qualities have been studied by contact angle measurements. We have studied the pH effect on Al/Si/SiO 2 /HfO 2 /electrolyte capacitance values for different phosphate buffer solutions (PBS). This optimization step has allowed a sensitivity value of about 44 mV decade −1 towards H + ions. The fabricated sensors based on Si 3 N 4 and HfO 2 transducers functionalized with a Co(II)Pc-AP membrane have been characterized by C(V) measurements for different perchlorate concentrations (from 10 −7 to 10 −2 M). The sensor developed with the HfO 2 transducer shows better performances compared to that based on Si 3 N 4 : a larger detection range (10 −7 to 10 −2 and 10 −3 to 10 −2 M, respectively) and lower detection limits (10 −7 and 10 −3 M). The specificities of our perchlorate sensor have been tested for some interfering ions (nitrate, sulfate and carbonate).

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