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Superconducting YBa2Cu3O7−x thin films have been prepared by coevaporation using an ozone vapor jet as an oxygen source. Films exhibiting zero resistance at 82 K have been fabricated in situ under high vacuum conditions using substrate temperatures of 700 °C without a post-evaporation anneal in oxygen. This process has implications for in situ measurements of fully superconducting surfaces using a variety of probes as well as for the fabrication of devices and structures whose properties are dependent on surfaces and interfaces.

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