We have investigated polarized Raman spectra on the {100} facet of B-doped CVD diamond single crystals grown under different diborane additions in the gas phase. An asymmetrical feature was observed on the one-phonon Raman line shape of B-doped diamond crystal which depended on the boron concentration.
We have performed Fano line fitting for each one-phonon line of the Raman components. Fano parameters which were calculated from Fano line fitting quantitatively represented the asymmetry of the one-phonon line. The relation between Fano parameters and boron concentrations obtained in this study can predict a certain amount of boron concentration of B-doped diamond. The difference of the Fano asymmetric parameters q between that obtained from 100 and 110 decreased with increasing boron concentration. This tendency was similar to that observed in the relation between the crystallinity and boron concentration.We suggest that the asymmetry of the one-phonon line is dominantly induced by crystalline disorder with boron incorporation.
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