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Cryst. Res. Technol. 341999 3 391-395The microhardness-depth profiles of as-obtained and annealed quartz (substrate)-Al (film) structures have been investigated. A layer of constant hardness has been detected beneath the initial interface. This is supposed to result from incorporation of aluminium atoms into the surface layer of the substrate, reduction of SiO 2 and diffusion of the atoms of a certain element during the processes of preparing and rapid thermal annealing of the structures.

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