Helium plasma source modelling was performed in order to obtain species density at balanced conditions under pressure of 1 atm. The software used in this modelling is matrix laboratory software (MATLAB). The equation used is a continuity equation that depends on the position and parameters of Arrhenius. Plasma temperatures used were 0.1 eV, 0.2 eV, 0.3 eV, and 0.5 eV. Species involved in a plasma consist of electrons, He, He + , He 2 + , He *, and He 2 * . The modelling results showed that the density value of He species increases as temperature increases. It is noted that the obtained the density of He (n He ) when reaching a balanced condition at the temperature of T = 0.