A B S T R A C T Surface micromachined corner cube reflectors made of 250pm square hinged polysilicon plates have been demonstrated to transmit digital signals over a range of 2 meters by reflecting an interrogating 5mW laser. Measured reflectance ranges from 34% to 77% for different mirror designs. Divergence of light reflected by CCR ranges from 15-35mrad. The CCRs are electrostatically actuated with 10 to 20V. The highest data rate transmitted with a CCR is 1K bps.
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