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Mid-infrared spectroscopy is essential for identifying molecular species, while related electro-optic modulators are crucial for signal-to-noise enhancement via synchronous detection. Therefore, the development of integrated modulators is expected to have a major impact in compact and widespread sensing applications. In this work, we experimentally demonstrate a broadband integrated electro-optic modulator, based on a graded-index SiGe photonics platform and free-carrier plasma dispersion effect. Optical modulation is reported from 6.4 to 10.7 μm wavelength, showing an operational frequency up to 225 MHz. These results pave the way for the development of multimolecule on-chip spectroscopic systems, operating at the longest mid-infrared wavelengths.

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