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This article represents a recommended practice for the calibration of ionization gauges using the comparison method. In this method, ionization gauges are compared to a working standard that has an SI traceable calibration. The ionization gauge is either of the hot-cathode ionization type or the cold-cathode ionization type. Details of the calibration apparatus, the principle of operation of the gauges, data analysis, uncertainty budget, and reporting the uncertainty are given.

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This article reviews the procedures and equipment used to maintain a vacuum system at pressures in the range from 10 −3 to 10 −11  torr. Equipment covered includes pumps, flanges, and sealing. Common pump types are covered, including details of their principles and technique of operation, as well as their recommended uses. Total and partial pressure gauges used in this range are also described. Common materials for vacuum systems and their properties are summarized along with fabrication methods. Leak detection methods and techniques are presented.