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For cantilever-based MEMS sensors, selective chemical modification of the sensing surface is used for the detection of chemical and biological analytes.

Summary: In this work, SU8 hydrophobic surfaces were synthesized and there electrowetting properties has been studied. The SU8 thin films has been deposited as dielectric materials over patterned electrode. The surface was chemically modified using Octadecyltrichlorosilane (OTS, Cl 3 Si (CH 3 ) 17 ) monolayer which resulted significant increase the water contact angle. The measurements shows that the obtained hydrophobic surface exhibited water contact angle of %127 AE 2 by applying the OTS self assembled monolayer on SU8 surface.

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