A classification of low-dimensional nanomaterials is given, and a new type of these nanomaterials – subnanophase coatings is proposed. Experimental results on the formation of a wetting layer of a transition metal on a silicon substrate by physical deposition in vacuum and results of this layer identification by the EELS method are given. Based on these results, a new approach to the formation of subnanophase coatings has been proposed by creation of a interface stresses which structuring WL. The possible properties and application prospects of subnanophase coatings are considered.