Nowadays, Web services and others SOA-based applications have attracted more attention in the software industry. The RESTful Web Service becomes an important service architectural style due to its simplicity, heterogeneity and web-based format. One of the principal advantages of the REST architecture is the interoperability. However, different implementation languages and representation data formats can break interoperability, especially on semantic description of these services. In this paper, we propose the use of a model driven approach for the development of semantic RESTful Web services. Raising the development abstraction level, providing language-independent metamodels of services and semantic resources and by model transformations it is possible to develop interoperable complex services.