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Using the scanning probe microscope to measure the effect of relative humidity on sample stiffness Rev. Sci. Instrum. 73, 3520 (2002); 10.1063/1.1505663Influence of data analysis and other factors on the short-term stability of vertical scanning-probe microscope calibration measurementsThe scanning probe microscope ͑SPM͒ is a kind of superprecision instrument with nanometer and even atomic resolution. The time stability of a SPM instrument is an important parameter. We measured the time stability and obtained the drift speed of a commercial SPM instrument quantitatively by using the method of image correlation. Then the drift was fed to the scanning piezotube to compensate. The experiment showed that the drift speed of our instrument was decreased by an order of magnitude during the scanning of 16 images. The possible causes of the drift are also discussed in the article.

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