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A femto- and picosecond laser assisted periodic nanostructuring of hydrogenated amorphous silicon (a-Si:H) is demonstrated. The grating structure with the subwavelength modulation of refractive index shows form birefringence (Δn ≈ −0.6) which is two orders of magnitude higher than commonly observed in uniaxial crystals and femtosecond laser nanostructured silica glass. The laser-induced giant birefringence and dichroism in a-Si:H film introduce extra dimensions to the polarization sensitive laser writing with applications that include data storage, security marking, and flat optics.

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