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The effect of the MeN (Me-Cr, Mo, Zr) layer composition in multi-period vacuum-arc (TiAlSi) N / MeN coatings with a nanoscale layer thickness on the predominant orientation of crystallite growth in layer s and hardness was studied. It was found that phases with a cubic crystal lattice (structural type NaCl) in the layers of all types (TiAlSi)N/MeN coatings are formed, although for the MoN phase under equilibrium conditions a hexagonal crystal lattice is preferred. The interrelation between the structure of MeN and (TiAlSi)N layers is revealed, as well as the effect of the structural state on the coating hardness. Defining influence of the MeN layer on the formation of three structural states types was found: with a preferential crystallite growth with the texture axis [111]; with the texture axis [100]; the formation of a non-textured state. The highest hardness of 47.8 GPa was achieved in the (TiAlSi)N/ZrN multilayer coating with the texture axis [111].

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