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We have improved the aperture efficiency of silicon integrated‐circuit horn antennas by optimizing the length of the dipole probes and by coating the entire horn walls with gold. To make these measurements, we developed a new thin‐film power‐density meter for measuring power density with accuracies better than 5%. The measured aperture efficiency improved from 44% to 72% at 93 GHz. This is sufficient for use in many applications which now use machined waveguide horns.