No abstract

This work presents the characterization and modeling of thermal MEMS for the determination of gas properties. The sensor consists of thermopiles arranged on a membrane, which allow the determination of the gas property-dependent temperature response of an electrically excited heating element. Experimental data are used to demonstrate the applicability of a lumped-model for the modeling of a thermoelectric gas property sensor. The calculated sensor's sensitivity for small quantities of hydrogen in nitrogen is about 0.7mV per % H2 at a heating power of 6 mW.