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This paper presents the design and the finite element analysis of one port piezoelectrically transduced micro electromechanical system resonator based on the contour mode vibrations (CMV) on lateral field excitation (LFE) suitable for high frequency (~2.28GHz) application with high quality factor 1600. The piezoelectric material, aluminum nitride (AlN) has been used to achieve high frequency-quality factor (f.Q) product for radio frequency (RF) applications as an oscillator and/or filter part of RF transceiver. Furthermore, this piezoelectric material accounts for high acoustic velocity and low dielectric loss. Along with material solution, the device dimensions have been scaled both in lateral and vertical directions in order to increase the frequency of operation with a relatively small value of motional resistance. Mode shape and frequency of the device has been confirmed by the analytical method and the statistical data evaluated is used to simulate the design. Fabrication procedure of the statistically optimized & simulated structure with only two level electron beam lithography is also proposed.

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This paper presents zinc oxide one port contour-mode machined resonator operated under global system for mobile communication range of frequency. TheS11 value of –38.57 dB at resonance frequency of 882 MHz in average was observed. The phase shift of the device and voltage standing wave ratio were noted as 115° and 1.18 respectively, sufficiently adopted for radio frequency communication. The device has been optimized for 21 aluminum interdigited fingers patterned over zinc oxide thin film. Two electron beam and two optical lithography were processed for fabricating the devices. Our findings are expected to provide effective approach for realizing efficient biocompatible detector for biomedical mass/pressure sensing application.