Manipulation of small components and assembly of Microsystems require force measurement. In the microworld (the world of very small components), signal/noise ratio is very low due to the weak amplitude of the signals. To be used in feedback control or in a micromanipulation system, a force sensor must allow static and dynamic measurements. In this paper, we present a micro-force measurement system based on the use of strain gauges and a Kalman optimal filter. Using a model of the measurement system and a statistical description of the noise, the optimal filter allows filtering the noise without loss of dynamic measurement. The performances of the measurement system are improved and fast force variations can be measured.
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