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The polishing process of Si substrate is introduced and its mechanism is analyzed theoretically in this paper. The regularity of removal rate of CMP by using circulation polishing is obtained through experimental study. Then, the stability of removal rate and its influence factors are analyzed systematically. Experiment results show that pH value, polishing temperature and viscosity are the main factors affecting the stability of removal rate. Finally, improving solutions for the removal rate fluctuation are presented.

A new method to measure dynamic balancing of motorcycle crankshaft based on LabVIEW is introduced. Crankshaft is a special rigid rotor. It is composed of crankshaft, connecting rod and slider. When the crankshaft rotates, its centrifugal forces are generated which result in the supporting structure (also called vibration table) vibrating. The vibration signal is detected by vibration sensors fixed to the vibration table, and sent to the computer. Data acquisition, signal processing and analyzing can be completed by virtual instrument based on LabVIEW. Then unbalance value including amplitude and phrases can be obtained. Computer-based measurement is used with software to set up automated test system that can make fast measurements without human intervention. The application of virtual instruments makes data analyzing more accurate, and decreases the measuring time significantly. The results show that this new measuring system has the advantages of easy-of-use, high precision, high efficiency and low costs.

A timely scheduling model is studied and a solution on load balance is attempted to explore from the point of machine learning in this paper. An expert system scheduling algorithm based on Support Vector Machine is presented.After research, the corresponding scheduling model is built, which is applied to the load balance of server cluster. Finally, the feasibility and validity of the algorithm is validated through experiments.