We develop a thermal-elastic stress
model using the finite element method to predict three-dimensional
anisotropic stress in AlN single crystals homoepitaxially grown by
the physical vapor transport process; we also perform numerical experiments
for a 1-in. AlN crystal surrounded by different cone-tube designs
and grown along various orientations. The influences of the cone-tube
shape and the growth orientation on the stresses inside the AlN crystal
are investigated in detail. The simulation results show that the von
Mises stress exceeds 1.11 GPa under all specified growth conditions,
while the anisotropy is negligible. The resolved shear stresses are
strongly dependent on the thermal gradient inside the growing crystal
and the growth orientation. Strong anisotropy of the resolved shear
stress is observed upon tilting of the growth orientation. The resolved
shear stress along {0001}⟨112̅0⟩ primary slip
system reveals that the c-axis growing crystal is
under tensile stress along all three primary slip directions. Nevertheless,
an inversion of the resolved shear stress from tensile to compressive
along the −a
3 slip direction is
observed when changing the growth orientation. The total resolved
shear stress shows 6-fold symmetry, reflection symmetry and 2-fold
symmetry along [001], [10√3], and [100] growth orientations,
respectively.
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