In this work a very small (20 µm x 20 µm) uncooled surfacemicromachined thermoelectric infrared detector is fabricated and tested. This TE detector features a P-doped polysilicon/Nichrome thermocouple embedded into a layer of Parylene-N to provide structural support. This sensor also features an umbrella-like IR absorber with the area of ~19 µm x 19 µm resulting in a 90% fill factor.At room temperature, a responsivity of ~150 V/W with a time constant of 1.3 ms is measured from the fabricated devices in vacuum when viewing a 500K blackbody without any concentrating optics. NEP and D* are calculated to be 2.6e-10 watt and 7.7e6 cm*Hz^0.5/w, respectively.
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