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Samarium doped tin oxide (SmDTO) nano particles were synthesized and deposited in the form of thin film by RF sputtering and was characterized using XRD and SEM. XRD images revealed the crystalline nature of tin oxide and reduced peak intensities in doped samples. SEM micrographs showed fine granular nature of tin oxide, mostly spherical and well isolated grains and slight agglomerations in doped sample. The current – voltage behavior of samarium doped tin oxide thin film was investigated using Electrochemical Impedance Spectroscopy (EIS). Temperature dependent EIS was performed on 0.5% SmDTO thin films to analyze the effect of doping on its charge transfer resistance. Due to doping, the charge carrier concentration improved surface conduction in SnO2 thin films which was reflected as a steady and gradual decrease in the charge transfer resistance.