X-ray photoelectron spectroscopy (XPS) and resonant x-ray emission spectroscopy (RXES) measurements of pellet and thin film forms of TiO 2 with implanted Fe ions are presented and discussed. The findings indicate that Fe-implantation in a TiO 2 pellet sample induces heterovalent cation substitution (Fe 2+ → Ti 4+ ) beneath the surface region. But in thin film samples, the clustering of Fe atoms is primarily detected. In addition to this, significant amounts of secondary phases of Fe 3+ are detected on the surface of all doped samples due to oxygen exposure. These experimental findings are compared with density functional theory (DFT) calculations of formation energies for different configurations of structural defects in the implanted TiO 2 :Fe system. According to our calculations, the clustering of Fe-atoms in TiO 2 :Fe thin films can be attributed to the formation of combined substitutional and interstitial defects. Further, the differences due to Fe doping in pellet and thin film samples can ultimately be attributed to different surface to volume ratios.
Titanium ions are implanted into amorphous SiO 2 at two different fluences using pulsed ion implantation, and the resulting samples are annealed. Bulk sensitive soft X-ray absorption spectroscopy of the Ti L 2;3 edge reveal strikingly different spectra for the two fluences. Spectral simulations using multiplet crystal field theory show clearly that for low fluence the Ti ions have a local octahedral coordination, while at higher fluence the formation of Ti 4þ -O tetrahedra dominates. Using O K-edge X-ray absorption and emission, the effect of the Ti states on the valence and conduction bands of the host SiO 2 is revealed. With the introduction of Ti tetrahedra, the band gap reduces from about 8 eV to just over 4 eV, due entirely to the Ti 3d conduction band states. These results demonstrate the possibility to obtain Ti-O tetrahedra in silica by Ti ion implantation and a suitable thermal treatment, clarify the mechanism of band gap reduction with Ti doping in SiO 2 , and demonstrate the sensitivity of L-edge X-ray absorption with a multiplet crystal field theory analysis to the Ti coordination of novel materials. V C 2013 American Institute of Physics. [http://dx
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