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We have developed embedded DRAM technology, in which 0.15pm logic transistor performance is fully compatible with that of pure logic process. The key technology is the newly developed MIM capacitor element having W/TiN/Ta,O,JTiN structure. This MIM capacitor element features that as low as 500°C is sufficient for the formation process. Excellent leakage current characteristics of 8E-15A/pm2@125"C with TJequivalent oxide thickness)=17A has been obtained. This technology has been actually implemented into 4Mbit test chip with the cell size of 0.425pm2. Over 50% yield without redundancy was obtained, confirming that there is no basic issue in process integration.

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A Flexible OLED is a surface-emitting light source that is thin, lightweight, and flexible. In spite of unique characteristics, there have been challenges in market development. In order to broaden the market, it is necessary to make clear the TRUE VALUE that only Flexible OLED can provide. At the origin of the TRUE VALUE is the Core value, which is "uniform surface-emitting light in extremely thin installation spaces". The Core value is made stronger by combining the three Boosters which is "Weight reduction", "Twilight control", and "Heatless touch".Ń This TRUE VALUE can be visualized in a triangular diagram.Core value is at the center and surrounded by Boosters. The number of Boosters will be increased with technology. The world of product design will largely change according to next Booster "Invisible magic" established by transparency technologies.