Abstract Trimethylsilyl dichlorothiophosphate (Me3SiOP(S)Cl2) and trimethylsilyl dibromothio-phosphate (Me3SiOP(S)Br2) are prepared by reactions of (Me3Si)2S with P0Cl3 and POBr3, respectively. The reaction of POBr3 with Me3SiOCOCH3 in the mol ratio 1:1 gives Me3SiOP(O)Br2, a molar ratio of 1:3 leads to (Me3SiO)3PO. The vibrational spectra have been used to elucidate the structures of the compounds. It was found that -OP(S)Cl2 as well as -OP(S)Br2 are linked to the trimethylsilyl group through the oxygen atom.

Die Reaktion des Disilylsulfids (I) mit Phosphoroxychlorid oder ‐bromid (II) liefert die O‐Silylthiophosphate (III).