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Multilayer coatings consisting of very smooth ReW and carbon films used as near-normal-incidence reflectors show theoretical performance in the 150–200-Å wavelength region and should allow the fabrication of useful normal-incidence mirrors for wavelengths as short as 50 Å.

Multilayer mirrors have been fabricated for various angles of incidence throughout the wavelength range λ=1.5–160 Å. Reflectivity increases by more than a factor 103 over the best single-film reflectors have been obtained. Measured reflectivities are around 10% near normal incidence in the λ=45–160-Å wavelength region and above 50% near grazing incidence (grazing angle 1°–2°) for λ=1.54 Å. The required thickness control has been achieved by monitoring the reflectivity of the films in situ during the deposition.

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