Abstract-Because of the low dimensional power of its force scaling law, surface tension is appropriate for carrying out reshaping and assembly in the microstructure size domain. This paper reviews work on surface tension powered self-assembly of microstructures. The existing theoretical approaches for rotational assembly are unified. The demonstrated fabrication processes are compared. Mechanisms for accurately determining the assembled shape are discussed, and the limits on accuracy and structural distortion are considered. Applications in optics, electronics and mechanics are described. More complex operations (including the combination of self-assembly and self-organization) are also reviewed.[926]Index Terms-Capillary force, microelectromechanical systems (MEMS), microsystems, microoptoelectromechanical systems (MOEMS), self-assembly, surface tension.

Abstract-A new surface micromachining process for surface tension powered self-assembly of silicon-based microstructures is described. Mechanical parts are formed from bonded silicon-oninsulator material and rotated out-of-plane by melting photoresist pads at low temperature. Simple mechanisms that allow accurate control of the final angle are introduced and used to construct fixed 45 mirrors and scanning mirror assemblies. [435]

Abstract-A wafer-scale, batch fabrication process for constructing quadrupole mass spectrometers using microelectromechanical systems (MEMS) technology is described. The device is formed from two bonded silicon-on-insulator ( [1447]Index Terms-Mass spectrometry, microelectromechanical systems (MEMS), quadrupole lens.

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Radio-frequency experimental measurements of magnetically coupled chains of L-C resonators supporting magneto-inductive (MI) waves are presented. MI waveguides are constructed using printed circuit board (PCB) inductors and external capacitors. Methods for increasing the nearest-neighbour coupling and reducing the non-nearest neighbour coupling using double-sided PCBs are demonstrated. Conditions for low propagation loss are determined, and a method of approximate matching to 50 transmission lines is presented. Propagation losses of 0.12 dB per element and coupling losses of 0.4 dB are achieved, using elements with Q-factors of 110 at ≈150 MHz frequency. Simple recursive Fabry-Perot filters are demonstrated by inserting reflectors into the waveguide.