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A new UHV spectroscopic X-ray photoelectron emission and low energy electron microscope is presently under construction for the installation at the PM-6 soft X-ray undulator beamline at BESSY II. Using a combination of a sophisticated magnetic beam splitter and an electrostatic tetrode mirror, the spherical and chromatic aberrations of the objective lens are corrected and thus the lateral resolution and sensitivity of the instrument improved. In addition a corrected imaging energy filter (a so-called omega filter) allows high spectral resolution (∆E = 0.1 eV) in the photoemission modes and background suppression in LEEM and small-spot LEED modes. The theoretical prediction for the lateral resolution is 5Å; a realistic goal is about 2 nm. Thus, a variety of electron spectroscopies (XAS, XPS, UPS, XAES) and electron diffraction (LEED, LEEM) or reflection techniques (MEM) will be available with spatial resolution unreached so far.

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The second development step of the SMART project, i.e. an energy-filtered but not yet corrected photoelectron emission microscope, operates at the undulator U49/1-PGM beamline at BESSY II. It already demonstrates the variety of methods of the final version: microscopy, spectroscopy and electron diffraction. Some recent experimental results are reported for these three operation modes. In addition, the theoretical improvement of lateral resolution and transmission of PEEMs in general by using an energy filter is discussed for systems without and with aberration correction.

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