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The mass-sensitive smart preconcentrator (SPC) can determine when it has collected sufficient sample for analysis by a downstream chemical sensor system. The SPC consists of a Lorentz-Force-actuated MEMS resonator with an integral heater and surface coating for the collection of chemical analytes. The resonant frequency of the device varies with the mass of collected analyte. The limit of detection (LOD) of the SPC is less than 50 ppb for DMMP (dimethyl-methyl-phosphonate). At 1 ppm, 1 second collection of DMMP is sufficient to trigger analysis in a downstream microsystem. This paper gives a brief overview of the SPC and its integration into microanalytical systems. The theory of operation, which is applicable to other torsional oscillators, is used to predict a shear modulus of silicon(100) of G = 57.0 GPa ± 2.2 GPa.

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