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Abstract-A novel silicon-on-insulator microdosimeter for estimating the radiobiological effectiveness (RBE) of a mixed radiation field is presented. An ion beam induced charge collection study has confirmed the microdosimeter possesses well defined micron sized 3D cylindrical sensitive volumes. An array of these SVs has the capability of studying the track structure of high energy heavy ions typical of a deep space environment.

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The CERN-EU High Energy Reference Field (CERF) facility is used in the calibration of neutron dosimeters for aviation and high energy physics applications. A comparison of the facility's microdosimetric spectra obtained with a new Silicon on Insulator (SOI) Microdosimeter and a HAWK Tissue Equivalent Proportional Counter (TEPC) are presented. Experimental measurements with a silicon PIN dosimeter diode are also described which indicate a small but significant contribution from charged particles to dosimetry measurements within the neutron dominated field.

Laser light scattering may be used as an powerful in-siiu probe of particulate contamination. Using this technique, it is showvn that certain silicon etching plasmas can produce significant amounts of particulatc contamination. In addition, using spatially-resulvcd mcasunments it is