Electrically insulating films of Al2O3 were deposited using thermal spray technology followed by the sputter deposition of a strain gauge pattern using shadow masking techniques. For the first time, a thin film strain gauge of chromium was successfully fabricated on thermally sprayed Al2O3 insulation. X-ray diffraction (XRD), scanning electron microscopy (SEM) and profilometer characterization techniques were used to examine structure and surface morphologies of the Al2O3 coatings. A gauge factor of around 2 was found for chromium film as well as hysteresis and creep for loads exceeding 1700 micro strain. The results are discussed.
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