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Current Solid Oxide Fuel Cell (SOFC) designs have operating temperatures between 800-1000 °C. Reducing this temperature to 500-600 °C would allow efficient utilization in varied applications. Yttria Doped Ceria (YDC) films show high ionic conductivity when used as fuel cell electrolytes in lower temperature ranges. This investigation shows that stoichiometric tunability of YDC film composition can be achieved through Atomic Layer Deposition (ALD). Film resistivity at room temperature is measured using a custom four-point probe sensor Film resistance analysis provides a method for evaluating the effect of doping and thickness of the film on desirable SOFC electrolyte characteristics such as high ionic conductivity.

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