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Topographical changes in the surfaces of GaAs (100) crystal by Ar+ beam sputtering at various temperatures are studied. It is found that the bombarded surface remains almost featureless in contrast to similar sputtering of metal targets where conical protrusions always appear. However, cones do appear at high temperature with simultaneous seeding with Cu. The results are discussed with a view of Wehner’s recent investigations in the development of conical structures.

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