S.H. Wang scite author profile

In this paper, we describe an optical interferometer applied to 3D inspection of microcomponents. The resulting interference fringes that are related to the deformation and surface contour of MEMS-components are analyzed by the fast Fourier transform (FFT) and 3-step phaseshifting algorithms. Experimental results show the feasibility of the proposed method for 3D deformation and surface contour measurement of micro-components.

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S.H. Wang

Integrated optical inspection on surface geometry and refractive index distribution of a microlens array

Surface roughness measurement of semi-conductor wafers using a modified total integrated scattering model

Determination of a micromirror angular rotation using laser interferometric method

Measurement of a micro-solderball height using a laser projection method

Optical Interferometric Inspection of Surface Contour of MEMS-Components

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