Attempts to improve the reliability of narrow passivated Al/Cu conductors as defmed by the performance in an accelerated electromigration test are reviewed. The results are explained in terms of the effect of thermally induced stress and stress voiding on electromigration lifetime. Other processing variations which produced small or inconsequential changes are also discussed. In addition, it was observed that electromigration perfonnance in samples susceptible to stress voiding was degraded as a function of storage time at room temperature.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.