KNbO 3 in the form of films is a highly acclaimed material due to its potential application in surface acoustic wave (SAW), and nonlinear optic devices. Single-source powder flash evaporation MOCVD of epitaxial KNbO 3 films was accomplished, for the first time, with potassium tert-butoxide and niobium heteroligand complex, Nb(O i Pr) 4 (thd) used as volatile metal±or-ganic precursors. The microstructure of the films was found to be dependent on the substrate used (MgO or SrTiO 3 ) and deposition temperature. A new approach to reach cation stoichiometry of deposited films deficient in potassium, consisting of a post-deposition annealing with a KNbO 3 /K 3 NbO 4 powder mixture, was proposed. The device quality of the films was verified by high second harmonic generation (SHG) output. The effect of the oxygen non-stoichiometry of films on the phase transition temperature was proven.
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